Thin film growth is a long-standing research topic in material science research. A better understand the relations of film’s stress with its experiment temperature, deposition rate and type of the material would allow us to make a good control on the deposition process. However, there is not much focus on the thin film growth fitting. In this work, a MATLAB is utilized for the fitting. This program includes a number of kinetic parameters, and we had a number of digitized experiment data. So, some important fitting parameters could be obtained from the parameters. And further, the relations of stress with deposition temperature, melting point and deposition rate were analyzed and obtained meaningful trends. High melting point materials would be more likely to behave zone I in film deposition, while others are following zone II or mixed zone T/II behaviors. Compressive stress is larger at higher deposition rate, and it also increases with higher deposition temperature.
Yang, Peilin,
"Fitting and Parameters Analysis of Thin Film Depositions"
(2020).
Materials Science Engineering Theses and Dissertations.
Brown Digital Repository. Brown University Library.
https://doi.org/10.26300/j7pw-b235