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Stress Generation and Relaxation in Thin Films: The Role of Kinetics and Grain Boundaries
Description:
In order to understand the stress behaviors in thin films, three related topics were investigated. First, intrinsic stress generation mechanisms were studied by in-situ stress …
Year:
2008
Contributor:
Shin, Jae Wook (creator)
Chason, Eric (director)
Bower, Allan (reader)
Gao, Huajian (reader)
Brown University. Division of Engineering. Materials Science Engineering (sponsor)
Genre:
theses
Subject:
stress
Sn
creep
epitaxial film growth
grain boundary
Thin films
Diffusion
Collection:
Engineering
Materials Science Engineering
Theses and Dissertations
Engineering
Theses and Dissertations
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