A Phenomenological Investigation of Metal-Metal Contacts at the Nanoscale for RF MEMS Switch Applications

Yang, Yinxuan

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Year:: 2015
Contributor:: Yang, Yinxuan (creator); Kingon, Angus (Director); Chason, Eric (Reader); Kim, Kyung-Suk (Reader); Brown University. ENGINEERING: Materials Science (sponsor)
Genre:: theses
Subject:: RF MEMS; Metal-Metal Contacts; Nanoscale; Radio frequency microelectromechanical systems
Extent:: xvii, 116 p.
DOI: https://doi.org/10.7301/Z0PZ576D

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Abstract:: RF MEMS contact switches play a very important role in mobile devices due to their low insertion losses and high on-off ratios. Gold has been used as the primary contact material for its beneficial physical and electrical properties such as negligible insulating oxide formation on the surface and very low resistance. In general, however, the performance and the reliability of the nano-size contacts in MEMS switches are very difficult to predict because the contact resistance is a strong function of the contact force, current and voltage, and surface chemistry (contamination). In this study, we investigate the nature of electrical and mechanical contact behaviors in nanoscale contacts. Atomic Force Microscope was used to perform experiments systematically to understand the behaviors of the contaminant layer on gold surfaces using the voltage, the current, the contact force, and the mechanical changes in the gold surface resulting from tip-substrate currents and voltage. Particular attention is focused on the hydrocarbon contamination on the gold surface and its interaction with the probe under low bias and low force conditions. To address and to model this hydrocarbon layer, we applied a uniform self-assembled-monolayer on the surface of the gold-based sample for comparison. In addition, similar study was conducted on Au-AuNi_(2 phases) alloy to characterize its mechanical and electrical properties. The role of oxide layer due to the added nickel were discussed, and compared with the carbonaceous layers.
Notes:: Thesis (Ph.D. -- Brown University (2015)

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Rights: In Copyright
Restrictions on Use: Collection is open for research.

Citation

Yang, Yinxuan, "A Phenomenological Investigation of Metal-Metal Contacts at the Nanoscale for RF MEMS Switch Applications" (2015). Materials Science Engineering Theses and Dissertations. Brown Digital Repository. Brown University Library. https://doi.org/10.7301/Z0PZ576D

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Materials Science Engineering Theses and Dissertations

Theses and Dissertations for the Materials Science Engineering department.
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